Inventor
KERSTAN MICHAEL
DE14 patents
⚠️ This page may combine multiple inventors who share the name “KERSTAN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SILTRONIC AG
5 patentsUS7867059B2Jan 11, 2011
Semiconductor wafer, apparatus and process for producing the semiconductor wafer
SILTRONIC AG21 citations87
US7815489B2Oct 19, 2010
Method for the simultaneous double-side grinding of a plurality of semiconductor wafers
SILTRONIC AG15 citations79
US7077726B2Jul 18, 2006
Semiconductor wafer with improved local flatness, and method for its production
SILTRONIC AG16 citations79
US9011209B2Apr 21, 2015
Method and apparatus for trimming the working layers of a double-side grinding apparatus
SILTRONIC AG2 citations62
US8986070B2Mar 24, 2015
Method for trimming the working layers of a double-side grinding apparatus
SILTRONIC AG0 citations51
PIETSCH GEORG
4 patentsUS8113913B2Feb 14, 2012
Method for the simultaneous grinding of a plurality of semiconductor wafers
PIETSCH GEORG22 citations89
US9539695B2Jan 10, 2017
Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers
PIETSCH GEORG3 citations69
US8911281B2Dec 16, 2014
Method for trimming the working layers of a double-side grinding apparatus
PIETSCH GEORG1 citations61
US8974267B2Mar 10, 2015
Insert carrier and method for the simultaneous double-side material-removing processing of semiconductor wafers
PIETSCH GEORG1 citations51