Inventor

CHEN THOMAS D

US6 patents

⚠️ This page may combine multiple inventors who share the name “CHEN THOMAS D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG KUANG L

2 patents

US8590136B2Nov 26, 2013

Method of fabricating a dual single-crystal backplate microphone

YANG KUANG L23 citations89

US8455288B2Jun 4, 2013

Method for etching material longitudinally spaced from etch mask

YANG KUANG L3 citations59

INVENSENSE INC

2 patents

US9219963B2Dec 22, 2015

Dual single-crystal backplate microphone system and method of fabricating same

INVENSENSE INC6 citations83

US9338559B2May 10, 2016

Microphone system with a stop member

INVENSENSE INC6 citations69

BHARATAN SUSHIL

1 patent

US9078069B2Jul 7, 2015

MEMS microphone with springs and interior support

BHARATAN SUSHIL10 citations81

MARTIN JOHN R

1 patent

US8389314B2Mar 5, 2013

MEMS device with roughened surface and method of producing the same

MARTIN JOHN R2 citations62