Inventor

NUNAN THOMAS KIERAN

US22 patents

⚠️ This page may combine multiple inventors who share the name “NUNAN THOMAS KIERAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUNAN THOMAS KIERAN

ANALOG DEVICES INC

Micromachined microphone and multisensor and method for producing same

Single crystal silicon sensor with additional layer and method of producing the same

MEMS device with conductive path through substrate

MEMs device with outgassing shield

Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry

Through silicon via (TSV) formation in integrated circuits

Microchip with blocking apparatus and method of fabricating microchip

Microchip with blocking apparatus

Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry

Apparatus and method of forming a MEMS device with etch channels

Method of fabricating piezoelectric MEMS devices

Apparatus and method for forming alignment features for back side processing of a wafer

Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications

NUNAN THOMAS KIERAN

Single crystal silicon sensor with additional layer and method of producing the same

Single crystal silicon sensor with additional layer and method of producing the same

Method of bonding wafers

PANASONIC IP MAN CO LTD

Sensing device

Single anchor resonators

Semiconductor device and method of manufacturing thereof

MARTIN JOHN R

Micromachined microphone and multisensor and method for producing same

MEMS device with roughened surface and method of producing the same

CHEN LI

Reduced stiction MEMS device with exposed silicon carbide