Inventor · disambiguated record
Albert M. Lambson
Also filed as: LAMBSON ALBERT M
3 granted patents·317 citations·filing 1995–2000
79Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0196US6239403B1Power segmented electrodeLAM RES CORP·Filed 2000·Granted May 29, 2001·102 cites·21 claims
- 0294US6042686APower segmented electrodeLAM RES CORP·Filed 1995·Granted Mar 28, 2000·117 cites·18 claims
- 0383US5933314AMethod and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucksLAM RES CORP·Filed 1997·Granted Aug 3, 1999·98 cites·17 claims
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