Inventor

SIMS JAMES S

US18 patents

⚠️ This page may combine multiple inventors who share the name “SIMS JAMES S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SIMS JAMES S

NOVELLUS SYSTEMS INC

PMOS transistor with compressive dielectric capping layer

Method for improving process control and film conformality of PECVD film

High compressive stress carbon liners for MOS devices

Strained transistor architecture and method

High compressive stress carbon liners for MOS devices

Method for making high stress boron-doped carbon films

PMOS transistor with compressive dielectric capping layer

Contoured showerhead for improved plasma shaping and control

LAM RES CORP

Method for depositing metals free ald silicon nitride films using halide-based precursors

Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD

Plasma enhanced atomic layer deposition with pulsed plasma exposure

Method of depositing ammonia free and chlorine free conformal silicon nitride film

Method for depositing ALD films using halide-based precursors

Method of depositing silicon nitride films

VARADARAJAN BHADRI

Cascaded cure approach to fabricate highly tensile silicon nitride films

Cascaded cure approach to fabricate highly tensile silicon nitride films

Tensile dielectric films using UV curing

LEESER KARL F

Contoured showerhead for improved plasma shaping and control