Inventor
PARK HYUNG-SANG
KR25 patents
⚠️ This page may combine multiple inventors who share the name “PARK HYUNG-SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM GENITECH KOREA LTD
4 patentsUSRE47170EDec 18, 2018
Method of forming semiconductor patterns
ASM GENITECH KOREA LTD441 citations98
US7138336B2Nov 21, 2006
Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof
ASM GENITECH KOREA LTD139 citations94
US7541284B2Jun 2, 2009
Method of depositing Ru films having high density
ASM GENITECH KOREA LTD24 citations92
US7976898B2Jul 12, 2011
Atomic layer deposition apparatus
ASM GENITECH KOREA LTD16 citations91
PARK HYUNG SANG
3 patentsUS8092606B2Jan 10, 2012
Deposition apparatus
PARK HYUNG SANG345 citations97
US8502391B2Aug 6, 2013
Semiconductor device and method of making single layer substrate with asymmetrical fibers and reduced warpage
PARK HYUNG SANG4 citations62
US8747948B2Jun 10, 2014
Deposition apparatus
PARK HYUNG SANG1 citations51