Inventor
FUKUDA MUNEYUKI
JP96 patents
⚠️ This page may combine multiple inventors who share the name “FUKUDA MUNEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
24 patentsUS6858851B2Feb 22, 2005
Apparatus for specimen fabrication and method for specimen fabrication
HITACHI HIGH TECH CORP57 citations96
US7326942B2Feb 5, 2008
Ion beam system and machining method
HITACHI HIGH TECH CORP24 citations93
US7095021B2Aug 22, 2006
Method, apparatus and system for specimen fabrication by using an ion beam
HITACHI HIGH TECH CORP19 citations93
US7462828B2Dec 9, 2008
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008
Inspection method and inspection apparatus using charged particle beam
HITACHI HIGH TECH CORP28 citations92
US11043359B2Jun 22, 2021
Charged particle beam apparatus and charged particle beam inspection system
HITACHI HIGH TECH CORP14 citations85
US7952083B2May 31, 2011
Ion beam system and machining method
HITACHI HIGH TECH CORP11 citations84
US7557347B2Jul 7, 2009
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
HITACHI HIGH TECH CORP11 citations84
US7368729B2May 6, 2008
Method, apparatus and system for specimen fabrication by using an ion beam
HITACHI HIGH TECH CORP12 citations84
US7242013B2Jul 10, 2007
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
HITACHI HIGH TECH CORP10 citations84
US10879037B2Dec 29, 2020
Charged particle beam device with distance setting between irradiation regions in a scan line
HITACHI HIGH TECH CORP8 citations83
US10714304B2Jul 14, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP8 citations83
US7875849B2Jan 25, 2011
Electron beam apparatus and electron beam inspection method
HITACHI HIGH TECH CORP7 citations83
US7655907B2Feb 2, 2010
Charged particle beam apparatus and pattern measuring method
HITACHI HIGH TECH CORP12 citations83
US7482603B2Jan 27, 2009
Apparatus and method for specimen fabrication
HITACHI HIGH TECH CORP10 citations83
US7884325B2Feb 8, 2011
Electron beam measurement apparatus
HITACHI HIGH TECH CORP6 citations74
US7453072B2Nov 18, 2008
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
HITACHI HIGH TECH CORP7 citations74
US10037866B2Jul 31, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP5 citations73
US11398367B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations72
US11398366B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11355308B2Jun 7, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US10340115B2Jul 2, 2019
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US9892887B2Feb 13, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations72
US9644955B2May 9, 2017
Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same
HITACHI HIGH TECH CORP2 citations72
HITACHI LTD
18 patentsUS6927391B2Aug 9, 2005
Method and apparatus for processing a micro sample
HITACHI LTD69 citations99
US6781125B2Aug 24, 2004
Method and apparatus for processing a micro sample
HITACHI LTD114 citations99
US6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US6717156B2Apr 6, 2004
Beam as well as method and equipment for specimen fabrication
HITACHI LTD109 citations98
US7550750B2Jun 23, 2009
Method and apparatus for processing a micro sample
HITACHI LTD26 citations96
US7205560B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD32 citations96
US7205554B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD34 citations96
US6838667B2Jan 4, 2005
Method and apparatus for charged particle beam microscopy
HITACHI LTD59 citations96
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US7888639B2Feb 15, 2011
Method and apparatus for processing a micro sample
HITACHI LTD14 citations93
US7470918B2Dec 30, 2008
Method and apparatus for processing a micro sample
HITACHI LTD22 citations93
US7465945B2Dec 16, 2008
Method and apparatus for processing a micro sample
HITACHI LTD20 citations93
US6627889B2Sep 30, 2003
Apparatus and method for observing sample using electron beam
HITACHI LTD21 citations93
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92
US7372050B2May 13, 2008
Method of preventing charging, and apparatus for charged particle beam using the same
HITACHI LTD5 citations74
US6977376B2Dec 20, 2005
Method of prevention charging, and apparatus for charged particle beam using the same
HITACHI LTD6 citations74
US6774363B2Aug 10, 2004
Method of preventing charging, and apparatus for charged particle beam using the same
HITACHI LTD5 citations74
FUKUDA MUNEYUKI
5 patentsUS8841612B2Sep 23, 2014
Charged particle beam microscope
FUKUDA MUNEYUKI12 citations83
US8389935B2Mar 5, 2013
Charged particle beam apparatus permitting high-resolution and high-contrast observation
FUKUDA MUNEYUKI7 citations83
US8766183B2Jul 1, 2014
Charged particle beam device
FUKUDA MUNEYUKI8 citations82
US9123501B2Sep 1, 2015
Device for correcting diffraction aberration of electron beam
FUKUDA MUNEYUKI4 citations73
US8431915B2Apr 30, 2013
Charged particle beam apparatus permitting high resolution and high-contrast observation
FUKUDA MUNEYUKI4 citations73
TOKUDA MITSUO
2 patentsFUKADA ATSUKO
1 patentShowing the top 50 of 96 patents by PatentIndex Score.