Inventor
VOSSENBERG HEINZ-GEORG
DE6 patents
Patents
6 patentsUS5937275AAug 10, 1999
Method of producing acceleration sensors
BOSCH GMBH ROBERT67 citations95
US6272926B1Aug 14, 2001
Micromechanical component
BOSCH GMBH ROBERT65 citations94
US7270011B2Sep 18, 2007
Combined absolute-pressure and relative-pressure sensor
BOSCH GMBH ROBERT12 citations82
US6395574B2May 28, 2002
Micromechanical component and appropriate manufacturing method
BOSCH GMBH ROBERT13 citations73
US6790699B2Sep 14, 2004
Method for manufacturing a semiconductor device
BOSCH GMBH ROBERT10 citations72
US6268232B1Jul 31, 2001
Method for fabricating a micromechanical component
BOSCH GMBH ROBERT12 citations72