Inventor
VAN DER WERF JAN EVERT
NL24 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER WERF JAN EVERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
21 patentsUS6937344B2Aug 30, 2005
Method of measuring overlay
ASML NETHERLANDS BV36 citations92
US6937334B2Aug 30, 2005
Method of measuring alignment of a substrate with respect to a reference alignment mark
ASML NETHERLANDS BV29 citations92
US6879374B2Apr 12, 2005
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV13 citations84
US7277185B2Oct 2, 2007
Method of measuring overlay
ASML NETHERLANDS BV12 citations83
US7283236B2Oct 16, 2007
Alignment system and lithographic apparatus equipped with such an alignment system
ASML NETHERLANDS BV13 citations82
US7075620B2Jul 11, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations74
US7012673B2Mar 14, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations73
US6747282B2Jun 8, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV12 citations73
US6963391B2Nov 8, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations70
US7499149B2Mar 3, 2009
Holographic mask for lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations63
US7492443B2Feb 17, 2009
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV3 citations63
US7459690B2Dec 2, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations63
US7105837B2Sep 12, 2006
Lithographic apparatus, device manufacturing method and radiation system
ASML NETHERLANDS BV4 citations63
US7453577B2Nov 18, 2008
Apparatus and method for inspecting a patterned part of a sample
ASML NETHERLANDS BV3 citations62
US7095499B2Aug 22, 2006
Method of measuring alignment of a substrate with respect to a reference alignment mark
ASML NETHERLANDS BV4 citations62
US6888151B2May 3, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations62
US7307712B2Dec 11, 2007
Method of detecting mask defects, a computer program and reference substrate
ASML NETHERLANDS BV2 citations58
USRE42741ESep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7630060B2Dec 8, 2009
Device manufacturing method, lithographic apparatus and device manufactured thereby
ASML NETHERLANDS BV1 citations52
US7309869B2Dec 18, 2007
Lithographic apparatus, device manufacturing method and radiation system
ASML NETHERLANDS BV0 citations52
US7505116B2Mar 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48