Holographic mask for lithographic apparatus and device manufacturing method

Abstract

A holographic mask includes a plurality of pixels each imparting a calculated phase and/or amplitude change to the projection beam to provide an image that is parallel to the mask. The holographic mask is used displaced from the best object plane of the projection lens.

1. A lithographic projection apparatus comprising:
 an illumination system for conditioning a beam of radiation; 
 a support structure supporting a lithographic patterning device, the patterning device comprising a reflective holographic element and serving to pattern the projection beam according to a desired pattern; 
 a substrate table for holding a substrate; 
 a projection system for projecting the patterned beam onto a target portion of the substrate, 
 the holographic patterning device further being constructed and arranged to provide an image that is substantially coincident with a best object plane of the projection system, and substantially parallel to the patterning device, the projection system being configured to project the image onto the target portion of the substrate, the support structure further being arranged to position the patterning device in a plane displaced from the best object plane of the projection system. 
 
   
   
     2. Apparatus according to  claim 1  wherein the radiation system is adapted to provide a projection beam of radiation having a wavelength in the range of from about 5 nm to about 20 nm. 
   
   
     3. Apparatus according to  claim 1  wherein the projection system has a numerical aperture at the side of the patterning device of less than 0.2. 
   
   
     4. Apparatus according to  claim 3  wherein the numerical aperture is less than 0.1. 
   
   
     5. A device manufacturing method comprising:
 providing a beam of radiation; 
 patterning the beam with a pattern in a cross-section of the beam; 
 projecting the patterned beam of radiation onto a target portion of a substrate; and 
 positioning a holographic patterning device in the beam at a position displaced from a best object plane of an optical system used in the projecting, 
 wherein the patterning further comprises:
 reflecting the beam of radiation; and 
 holographically providing an image substantially coincident with the best object plane, and 
 
 wherein the projecting further comprises projecting the image onto the target portion of the substrate. 
 
   
   
     6. A method according to  claim 5 , wherein the patterning further comprises modulating the beam of radiation. 
   
   
     7. A method according to  claim 5 , further comprising controlling a plurality of picture elements of the holographic patterning device, to impart a predetermined phase change and/or attenuation to the beam of radiation. 
   
   
     8. A lithographic projection apparatus comprising:
 an illumination system for conditioning a beam of radiation; 
 a support structure supporting a lithographic patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; 
 a substrate table for holding a substrate; 
 a projection system for projecting the patterned beam onto a target portion of the substrate, 
 the holographic patterning device further being constructed and arranged to provide an image that is substantially coincident with a best object plane of the projection system, and substantially parallel to the patterning device, the projection system being configured to project the image onto the target portion of the substrate, the support structure further being arranged to position the patterning device in a plane displaced from the best object plane of the projection system, and 
 wherein the holographic patterning device is located between the best object plane and the projection system. 
 
   
   
     9. Apparatus according to  claim 8 , wherein the best object plane is located between the illumination system and the projection system.