Inventor
GILJUM RICHARD
US7 patents
⚠️ This page may combine multiple inventors who share the name “GILJUM RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS5980194ANov 9, 1999
Wafer position error detection and correction system
APPLIED MATERIALS INC232 citations95
US11784076B2Oct 10, 2023
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC2 citations72
US11424149B2Aug 23, 2022
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC1 citations72
US10755955B2Aug 25, 2020
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC4 citations72
US10217650B2Feb 26, 2019
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9443714B2Sep 13, 2016
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51