Inventor · disambiguated record

Martin Von Hodenberg

Also filed as: HODENBERG MARTIN VON

1 granted patent·1 citations·filing 2015–2015

17Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0167US9846367B2Projection exposure apparatus with at least one manipulatorZEISS CARL SMT GMBH·Filed 2015·Granted Dec 19, 2017·1 cites·24 claims

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