Inventor · disambiguated record
Masahito Kitamura
Also filed as: KITAMURA MASAHITO
10 granted patents·3 pending applications·10 citations·filing 2010–2024
80Inventor score
Top patents by PatentIndex Score
13 records- 0182US9024284B2Superlattice phase change memory including Sb2Te3 layers containing ZrHITACHI LTD·Filed 2013·Granted May 5, 2015·5 cites·15 claims
- 0280US10584419B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2018·Granted Mar 10, 2020·2 cites·21 claims
- 0371US9735007B2Method of processing substrate, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Aug 15, 2017·2 cites·10 claims
- 0461US8685866B2Method of manufacturing semiconductor device and substrate processing apparatusHORII SADAYOSHI·Filed 2010·Granted Apr 1, 2014·1 cites·10 claims
- 0560US11047048B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Jun 29, 2021·0 cites·20 claims
- 0653US2024170310A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0750US11075114B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jul 27, 2021·0 cites·19 claims
- 0844US10355098B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 16, 2019·0 cites·16 claims
- 0942US10388762B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 20, 2019·0 cites·8 claims
- 1040US9368358B2Method of manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted Jun 14, 2016·0 cites·11 claims
- 1138US2019081238A1Method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2018·Application pending·0 cites
- 1237US9761456B2Method of manufacturing semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Sep 12, 2017·0 cites·7 claims
- 1334US2016293421A1Method of manufacturing semiconductor device and recording mediumHITACHI INT ELECTRIC INC·Filed 2016·Application pending·0 cites
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