Inventor · disambiguated record
Adrianus Martinus Van Der Wielen
Also filed as: VAN DER WIELEN ADRIANUS MARTINUS
4 granted patents·17 citations·filing 2011–2017
68Inventor score
Top patents by PatentIndex Score
4 records- 0188US9417533B2Method of operating a patterning device and lithographic apparatusPROSYENTSOV VITALIY·Filed 2011·Granted Aug 16, 2016·15 cites·20 claims
- 0284US9958788B2Method of operating a patterning device and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 0354US9568833B2Method of operating a patterning device and lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted Feb 14, 2017·0 cites·20 claims
- 0435US9857694B2Estimating deformation of a patterning device and/or a change in its positionASML NETHERLANDS BV·Filed 2015·Granted Jan 2, 2018·0 cites·25 claims
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