Inventor · disambiguated record
Elham Mohimi
Also filed as: MOHIMI ELHAM
8 granted patents·1 pending application·31 citations·filing 2015–2023
83Inventor score
Top patents by PatentIndex Score
9 records- 0193US10566194B2Selective deposition of etch-stop layer for enhanced patterningLAM RES CORP·Filed 2018·Granted Feb 18, 2020·5 cites·20 claims
- 0289US11584986B1Area selective CVD of metallic films using precursor gases and inhibitorsUNIV ILLINOIS·Filed 2018·Granted Feb 21, 2023·12 cites·36 claims
- 0387US11094542B2Selective deposition of etch-stop layer for enhanced patterningLAM RES CORP·Filed 2020·Granted Aug 17, 2021·2 cites·20 claims
- 0485US10103057B2Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrateUNIV ILLINOIS·Filed 2015·Granted Oct 16, 2018·6 cites·59 claims
- 0584US10472716B1Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2018·Granted Nov 12, 2019·4 cites·20 claims
- 0674US10643889B2Pre-treatment method to improve selectivity in a selective deposition processLAM RES CORP·Filed 2018·Granted May 5, 2020·2 cites·19 claims
- 0771US11869770B2Selective deposition of etch-stop layer for enhanced patterningLAM RES CORP·Filed 2021·Granted Jan 9, 2024·0 cites·20 claims
- 0857US10745806B2Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2019·Granted Aug 18, 2020·0 cites·20 claims
- 0952US2025382703A1Plasma enhanced low temperature atomic layer deposition of metalsLAM RES CORP·Filed 2023·Application pending·0 cites
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