Inventor · disambiguated record
Huang Soon Kang
Also filed as: KANG HUANG SOON
5 granted patents·33 citations·filing 2009–2012
76Inventor score
Top patents by PatentIndex Score
5 records- 0188US9102033B2Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing processHUI KEUNG·Filed 2010·Granted Aug 11, 2015·11 cites·20 claims
- 0284US8277286B2Slurry dispenser for chemical mechanical polishing (CMP) apparatus and methodHUNG KUN-KU·Filed 2009·Granted Oct 2, 2012·17 cites·19 claims
- 0375US10857649B2Method and apparatus for performing a polishing process in semiconductor fabricationLEE BO I·Filed 2011·Granted Dec 8, 2020·4 cites·18 claims
- 0458US8673783B2Metal conductor chemical mechanical polishKANG HUANG SOON·Filed 2010·Granted Mar 18, 2014·1 cites·14 claims
- 0550US9242342B2Manufacture and method of making the sameLEE BO-I·Filed 2012·Granted Jan 26, 2016·0 cites·20 claims
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