Inventor · disambiguated record
Ilya Malakhovsky
Also filed as: MALAKHOVSKY ILYA
5 granted patents·2 pending applications·9 citations·filing 2016–2023
70Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0185US11300889B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 12, 2022·3 cites·20 claims
- 0281US10192772B2Substrate table and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·20 claims
- 0378US11226567B2Methods and apparatus for use in a device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jan 18, 2022·2 cites·20 claims
- 0457US2025199421A1Substrate warpage determination systemASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0551US11300888B2Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program productASML NETHERLANDS BV·Filed 2018·Granted Apr 12, 2022·0 cites·20 claims
- 0640US12449726B2Apparatus for assembly of a reticle assemblyASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
- 0736US2019041758A1Methods of determining a mechanical property of a layer applied to a substrate, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →