Inventor · disambiguated record
Amandev Singh
Also filed as: SINGH AMANDEV
6 granted patents·18 citations·filing 2015–2019
77Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0192US9753379B2Inspection apparatus and methods, methods of manufacturing devicesASML NETHERLANDS BV·Filed 2015·Granted Sep 5, 2017·7 cites·24 claims
- 0285US11300889B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 12, 2022·3 cites·20 claims
- 0382US10534274B2Method of inspecting a substrate, metrology apparatus, and lithographic systemASML NETHERLANDS BV·Filed 2017·Granted Jan 14, 2020·2 cites·18 claims
- 0482US10437159B2Measurement system, lithographic system, and method of measuring a targetASML NETHERLANDS BV·Filed 2017·Granted Oct 8, 2019·2 cites·20 claims
- 0577US9786044B2Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 0643US9921489B2Focus monitoring arrangement and inspection apparatus including such an arrangementASML NETHERLANDS BV·Filed 2015·Granted Mar 20, 2018·0 cites·23 claims
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