Inventor · disambiguated record
Maocheng Li
Also filed as: LI MAOCHENG
4 granted patents·5 pending applications·427 citations·filing 1997–2015
83Inventor score
Top patents by PatentIndex Score
9 records- 0196US6447636B1Plasma reactor with dynamic RF inductive and capacitive coupling controlAPPLIED MATERIALS INC·Filed 2000·Granted Sep 10, 2002·215 cites·43 claims
- 0291US6380095B1Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosionAPPLIED MATERIALS INC·Filed 2000·Granted Apr 30, 2002·66 cites·21 claims
- 0387US6127278AEtch process for forming high aspect ratio trenched in siliconAPPLIED MATERIALS INC·Filed 1997·Granted Oct 3, 2000·103 cites·23 claims
- 0486US6827869B2Method of micromachining a multi-part cavityFiled 2002·Granted Dec 7, 2004·43 cites·21 claims
- 0548US2006188742A1Chamber component having grooved surfaceAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 0644US2007079936A1Bonded multi-layer RF windowAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0734US2002100557A1ICP window heater integrated with faraday shield or floating electrode between the source power coil and the ICP windowAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 0834US2001045354A1Method of etching high aspect ratio openings in siliconFiled 2001·Application pending·0 cites
- 0923US2016102394A1Method for preparing grounding substrate for semiconductor deviceSHENYANG FORTUNE PREC EQUIPMENT CO LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →