Inventor · disambiguated record
Cheonkyu Lee
Also filed as: LEE CHEONKYU
3 granted patents·1 pending application·3 citations·filing 2019–2021
54Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0170US10818503B2Method of etching at low temperature and plasma etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 27, 2020·2 cites·16 claims
- 0268US11244839B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Feb 8, 2022·1 cites·12 claims
- 0362US12106945B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Oct 1, 2024·0 cites·20 claims
- 0453US2020176230A1Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →