Inventor · disambiguated record
Rivka Sherman
Also filed as: SHERMAN RIVKA
6 granted patents·652 citations·filing 1991–2009
89Inventor score
Technology areasG01N
Top patents by PatentIndex Score
6 records- 0197US5699447ATwo-phase optical inspection method and apparatus for defect detectionORBOT INSTR LTD·Filed 1991·Granted Dec 16, 1997·311 cites·16 claims
- 0296US6178257B1Substrate inspection method and apparatusAPPLIED MATERIALS INC·Filed 1999·Granted Jan 23, 2001·178 cites·17 claims
- 0394US5982921AOptical inspection method and apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Nov 9, 1999·103 cites·26 claims
- 0493US7796807B2Optical inspection apparatus for substrate defect detectionAPPLIED MATERIALS ISRAEL LTD·Filed 2009·Granted Sep 14, 2010·18 cites·9 claims
- 0589US6952491B2Optical inspection apparatus for substrate defect detectionAPPLIED MATERIALS INC·Filed 2001·Granted Oct 4, 2005·27 cites·10 claims
- 0683US7499583B2Optical inspection method for substrate defect detectionAPPLIED MATERIALS ISRAEL LTD·Filed 2004·Granted Mar 3, 2009·15 cites·1 claims
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