Inventor · disambiguated record
Charles Michael Birtcher
Also filed as: BIRTCHER CHARLES M · BIRTCHER CHARLES MICHAEL
29 granted patents·5 pending applications·350 citations·filing 1999–2021
96Inventor score
Files withAIR PROD & CHEM20VERSUM MAT US LLC9BIRTCHER CHARLES MICHAEL3S O I T E C SILICON ON INSULAT1STEIDL THOMAS ANDREW1
Top patents by PatentIndex Score
34 records- 0197US8959998B2Ultrasonic liquid level sensing systemsAIR PROD & CHEM·Filed 2014·Granted Feb 24, 2015·20 cites·18 claims
- 0294US7334595B2Cabinet for chemical delivery with solvent purging and removalAIR PROD & CHEM·Filed 2005·Granted Feb 26, 2008·35 cites·19 claims
- 0388US10663072B2Valve block having minimal deadlegVERSUM MAT US LLC·Filed 2015·Granted May 26, 2020·7 cites·20 claims
- 0488US9550260B2Ultrasonic liquid level sensing systemsAIR PROD & CHEM·Filed 2016·Granted Jan 24, 2017·2 cites·8 claims
- 0587US10480070B2Delivery container with flow distributorVERSUM MAT US LLC·Filed 2017·Granted Nov 19, 2019·2 cites·15 claims
- 0687US8708320B2Splashguard and inlet diffuser for high vacuum, high flow bubbler vesselSTEIDL THOMAS ANDREW·Filed 2007·Granted Apr 29, 2014·11 cites·10 claims
- 0787US6431229B1Solventless purgeable diaphragm valved manifold for low vapor pressure chemicalsAIR PROD & CHEM·Filed 2001·Granted Aug 13, 2002·49 cites·20 claims
- 0886US9598766B2Vessel with filterAIR PROD & CHEM·Filed 2013·Granted Mar 21, 2017·6 cites·5 claims
- 0986US8162296B2Splashguard for high flow vacuum bubbler vesselBIRTCHER CHARLES MICHAEL·Filed 2009·Granted Apr 24, 2012·10 cites·6 claims
- 1085US11166441B2Vapor delivery container with flow distributorVERSUM MAT US LLC·Filed 2019·Granted Nov 9, 2021·5 cites·10 claims
- 1184US6953047B2Cabinet for chemical delivery with solvent purgingAIR PROD & CHEM·Filed 2002·Granted Oct 11, 2005·34 cites·21 claims
- 1282US7261118B2Method and vessel for the delivery of precursor materialsAIR PROD & CHEM·Filed 2004·Granted Aug 28, 2007·29 cites·35 claims
- 1380US9435027B2Splashguard and inlet diffuser for high vacuum, high flow bubbler vesselAIR PROD & CHEM·Filed 2014·Granted Sep 6, 2016·1 cites·10 claims
- 1479US6264064B1Chemical delivery system with ultrasonic fluid sensorsAIR PROD & CHEM·Filed 1999·Granted Jul 24, 2001·47 cites·22 claims
- 1578US10563305B2Container for chemical precursors in a deposition processAIR PROD & CHEM·Filed 2016·Granted Feb 18, 2020·1 cites·20 claims
- 1678US10443128B2Vessel and method for delivery of precursor materialsAIR PROD & CHEM·Filed 2016·Granted Oct 15, 2019·1 cites·13 claims
- 1778US10151618B2Ultrasonic liquid level sensing systemsAIR PROD & CHEM·Filed 2015·Granted Dec 11, 2018·2 cites·26 claims
- 1878US8944420B2Splashguard for high flow vacuum bubbler vesselBIRTCHER CHARLES MICHAEL·Filed 2012·Granted Feb 3, 2015·4 cites·11 claims
- 1978US8002247B2Cross purge valve and container assemblyAIR PROD & CHEM·Filed 2009·Granted Aug 23, 2011·11 cites·12 claims
- 2077US9109287B2Solid source container with inlet plenumBIRTCHER CHARLES MICHAEL·Filed 2007·Granted Aug 18, 2015·3 cites·18 claims
- 2177US6648034B1Purgeable manifold for low vapor pressure chemicals containersAIR PROD & CHEM·Filed 2002·Granted Nov 18, 2003·19 cites·22 claims
- 2270US6966348B2Purgeable container for low vapor pressure chemicalsAIR PROD & CHEM·Filed 2003·Granted Nov 22, 2005·15 cites·10 claims
- 2369US6276404B1Chemical delivery system with spill containment doorAIR PROD & CHEM·Filed 2000·Granted Aug 21, 2001·23 cites·20 claims
- 2467US2021003442A1Ultrasonic Liquid Level Sensing SystemsVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
- 2562US7124913B2High purity chemical container with diptube and level sensor terminating in lowest most point of concave floorAIR PROD & CHEM·Filed 2003·Granted Oct 24, 2006·13 cites·13 claims
- 2657US10809115B2Ultrasonic liquid level sensing systemVERSUM MAT US LLC·Filed 2015·Granted Oct 20, 2020·0 cites·12 claims
- 2754US9316525B2Ultrasonic liquid level sensing systemsAIR PROD & CHEM·Filed 2014·Granted Apr 19, 2016·0 cites·20 claims
- 2850US2017137936A1Vessel With FilterVERSUM MAT US LLC·Filed 2017·Application pending·0 cites
- 2948US10871238B2Removable valve guard for ampoulesVERSUM MAT US LLC·Filed 2018·Granted Dec 22, 2020·0 cites·18 claims
- 3045US2010242835A1High volume delivery system for gallium trichlorideS O I T E C SILICON ON INSULAT·Filed 2007·Application pending·0 cites
- 3144US2020131630A1Aerosol-free vessel for bubbling chemical precursors in a deposition processVERSUM MAT US LLC·Filed 2018·Application pending·0 cites
- 3244US2008018004A1High Flow GaCl3 DeliveryAIR PROD & CHEM·Filed 2007·Application pending·0 cites
- 3332US9580293B2Diptube design for a host ampouleAIR PROD & CHEM·Filed 2015·Granted Feb 28, 2017·0 cites·19 claims
- 3431US11976740B2Limited volume coaxial valve blockVERSUM MAT US LLC·Filed 2021·Granted May 7, 2024·0 cites·21 claims
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