Assignee
VERSUM MAT US LLC
US·164 granted patents·128 pending applications·542 citations·filing 2013–2025
Top patents by PatentIndex Score
292 records- 0198US10468244B2Precursors and flowable CVD methods for making low-K films to fill surface featuresVERSUM MAT US LLC·Filed 2017·Granted Nov 5, 2019·388 cites·9 claims
- 0297US11152206B2Compositions and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2020·Granted Oct 19, 2021·4 cites·2 claims
- 0395US10453675B2Organoaminosilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2014·Granted Oct 22, 2019·17 cites·5 claims
- 0494US12110435B2Etching composition and method for selectively removing silicon nitride during manufacture of a semiconductor deviceVERSUM MAT US LLC·Filed 2022·Granted Oct 8, 2024·3 cites·18 claims
- 0593US10899500B2Alkoxysilylamine compounds and applications thereofVERSUM MAT US LLC·Filed 2019·Granted Jan 26, 2021·5 cites·12 claims
- 0692US10145008B2Compositions and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2016·Granted Dec 4, 2018·8 cites·20 claims
- 0792US2026098051A1Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 0891US12534579B2Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2024·Granted Jan 27, 2026·0 cites·12 claims
- 0991US2026049398A1Organoaminodisilazanes for high temperature atomic layer deposition of silicon oxide thin filmsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 1090US11952465B2Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2020·Granted Apr 9, 2024·1 cites·5 claims
- 1190US11912730B2Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2022·Granted Feb 27, 2024·2 cites·5 claims
- 1290US10822458B2Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2018·Granted Nov 3, 2020·2 cites·7 claims
- 1389US10316407B2Compositions and methods using same for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2015·Granted Jun 11, 2019·4 cites·11 claims
- 1489US2025304804A1Compositions and processes for depositing carbon-doped silicon-containing filmsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 1588US11078569B2Trisilylamine derivatives as precursors for high growth rate silicon-containing filmsVERSUM MAT US LLC·Filed 2018·Granted Aug 3, 2021·2 cites·10 claims
- 1688US10663072B2Valve block having minimal deadlegVERSUM MAT US LLC·Filed 2015·Granted May 26, 2020·7 cites·20 claims
- 1788US10465096B2Metal chemical mechanical planarization (CMP) composition and methods thereforeVERSUM MAT US LLC·Filed 2018·Granted Nov 5, 2019·4 cites·21 claims
- 1887US10985010B2Methods for making silicon and nitrogen containing filmsVERSUM MAT US LLC·Filed 2019·Granted Apr 20, 2021·4 cites·18 claims
- 1987US10480070B2Delivery container with flow distributorVERSUM MAT US LLC·Filed 2017·Granted Nov 19, 2019·2 cites·15 claims
- 2087US10249489B2Use of silyl bridged alkyl compounds for dense OSG filmsVERSUM MAT US LLC·Filed 2017·Granted Apr 2, 2019·7 cites·25 claims
- 2186US11139162B2Organoaminosilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2019·Granted Oct 5, 2021·2 cites·15 claims
- 2286US2025188605A1Compositions and Methods Using Same for Deposition of Silicon-Containing FilmVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 2386US2024304438A1Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 2485US11584854B2Compositions and methods for the deposition of silicon oxide filmsVERSUM MAT US LLC·Filed 2020·Granted Feb 21, 2023·1 cites·17 claims
- 2585US11353794B2Photoresist stripperVERSUM MAT US LLC·Filed 2018·Granted Jun 7, 2022·1 cites·16 claims
- 2685US11166441B2Vapor delivery container with flow distributorVERSUM MAT US LLC·Filed 2019·Granted Nov 9, 2021·5 cites·10 claims
- 2785US10106890B2Compositions and methods using same for deposition of silicon-containing filmVERSUM MAT US LLC·Filed 2015·Granted Oct 23, 2018·3 cites·9 claims
- 2884US11098069B2Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2019·Granted Aug 24, 2021·2 cites·8 claims
- 2984US10703915B2Compositions and methods for the deposition of silicon oxide filmsVERSUM MAT US LLC·Filed 2017·Granted Jul 7, 2020·1 cites·26 claims
- 3084US10253216B2Additives for barrier chemical mechanical planarizationVERSUM MAT US LLC·Filed 2017·Granted Apr 9, 2019·4 cites·34 claims
- 3184US2023348736A1Compositions and processes for depositing carbon-doped silicon-containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
- 3284US2026022136A1Silicon Compounds And Methods For Depositing Films Using SameVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 3384US2026071326A1Compositions and methods using same for thermal deposition silicon-containing filmsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 3483US12516073B2Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2023·Granted Jan 6, 2026·0 cites·8 claims
- 3583US2023377874A1Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
- 3682US11460778B2Photoresist stripperVERSUM MAT US LLC·Filed 2019·Granted Oct 4, 2022·3 cites·22 claims
- 3782US2025289779A1High purity ethylenediamine for semiconductor applicationsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 3881US11180697B2Etching solution having silicon oxide corrosion inhibitor and method of using the sameVERSUM MAT US LLC·Filed 2019·Granted Nov 23, 2021·2 cites·8 claims
- 3981US10934485B2Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor deviceVERSUM MAT US LLC·Filed 2018·Granted Mar 2, 2021·3 cites·19 claims
- 4080US11268190B2Processes for depositing silicon-containing films using halidosilane compoundsVERSUM MAT US LLC·Filed 2016·Granted Mar 8, 2022·2 cites·10 claims
- 4180US11078417B2Low oxide trench dishing chemical mechanical polishingVERSUM MAT US LLC·Filed 2019·Granted Aug 3, 2021·2 cites·5 claims
- 4280US2025183029A1Organoaminosilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 4380US2024190719A1Ultra-high purity tungsten chloridesVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 4479US11560533B2Post chemical mechanical planarization (CMP) cleaningVERSUM MAT US LLC·Filed 2019·Granted Jan 24, 2023·3 cites·6 claims
- 4579US11401441B2Chemical mechanical planarization (CMP) composition and methods therefore for copper and through silica via (TSV) applicationsVERSUM MAT US LLC·Filed 2018·Granted Aug 2, 2022·4 cites·2 claims
- 4679US10914001B2Volatile dihydropyrazinly and dihydropyrazine metal complexesVERSUM MAT US LLC·Filed 2019·Granted Feb 9, 2021·0 cites·14 claims
- 4779US10870799B2Etching solution for selectively removing tantalum nitride over titanium nitride during manufacture of a semiconductor deviceVERSUM MAT US LLC·Filed 2018·Granted Dec 22, 2020·2 cites·22 claims
- 4879US10395920B2Alkyl-alkoxysilacyclic compoundsVERSUM MAT US LLC·Filed 2018·Granted Aug 27, 2019·2 cites·14 claims
- 4979US10294250B2Organoaminosilanes and methods for making sameVERSUM MAT US LLC·Filed 2017·Granted May 21, 2019·1 cites·7 claims
- 5078US11742200B2Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2021·Granted Aug 29, 2023·0 cites·5 claims
Showing the top 50 of 292 patent records by PatentIndex Score.
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