Inventor · disambiguated record
Yasushi Hayashida
Also filed as: HAYASHIDA YASUSHI
32 granted patents·1 pending application·802 citations·filing 1990–2019
97Inventor score
Files withTOKYO ELECTRON LTD23AKIMOTO MASAMI2MATSUOKA NOBUAKI2TOYOTA MOTOR CO LTD2HAYASHIDA YASUSHI1
Top patents by PatentIndex Score
33 records- 0199US7591601B2Coater/developer, coating/developing method, and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Sep 22, 2009·464 cites·20 claims
- 0295US7322756B2Coating and developing apparatus and coating and developing methodTOKYO ELECTRON LTD·Filed 2005·Granted Jan 29, 2008·33 cites·11 claims
- 0395US7241061B2Coating and developing system and coating and developing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 10, 2007·34 cites·21 claims
- 0494US7281869B2Coating and developing system and coating and developing methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 16, 2007·30 cites·34 claims
- 0594US7267497B2Coating and developing system and coating and developing methodTOKYO ELECTRON LTD·Filed 2005·Granted Sep 11, 2007·29 cites·13 claims
- 0693US7474377B2Coating and developing systemTOKYO ELECTRON LTD·Filed 2006·Granted Jan 6, 2009·23 cites·17 claims
- 0792US7262829B2Coating and developing apparatus and coating and developing methodTOKYO ELECTRON LTD·Filed 2005·Granted Aug 28, 2007·22 cites·6 claims
- 0891US7245348B2Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaningTOKYO ELECTRON LTD·Filed 2005·Granted Jul 17, 2007·18 cites·27 claims
- 0989US7871211B2Coating and developing system, coating and developing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Jan 18, 2011·15 cites·20 claims
- 1088US7841072B2Apparatus and method of application and developmentTOKYO ELECTRON LTD·Filed 2006·Granted Nov 30, 2010·12 cites·7 claims
- 1187US8025023B2Coating and developing system, coating and developing method and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Sep 27, 2011·12 cites·12 claims
- 1280US7403260B2Coating and developing systemTOKYO ELECTRON LTD·Filed 2005·Granted Jul 22, 2008·7 cites·23 claims
- 1378US11131896B2Light control sheets and imaging systemsTOPPAN PRINTING CO LTD·Filed 2019·Granted Sep 28, 2021·2 cites·20 claims
- 1478US7793609B2Coating and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Sep 14, 2010·5 cites·6 claims
- 1577US8408158B2Coating/developing device and methodAKIMOTO MASAMI·Filed 2006·Granted Apr 2, 2013·7 cites·19 claims
- 1677US8206076B2Substrate processing systemUEDA ISSEI·Filed 2008·Granted Jun 26, 2012·8 cites·15 claims
- 1777US7729798B2Substrate processing system, and method of control therefor, control program, and storage mediumTOKYO ELECTRON LTD·Filed 2004·Granted Jun 1, 2010·20 cites·4 claims
- 1876US7678417B2Coating method and coating apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Mar 16, 2010·5 cites·14 claims
- 1973US7789577B2Coating and developing system, coating and developing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Sep 7, 2010·4 cites·20 claims
- 2070US7597492B2Coating and developing system, coating and developing method and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Oct 6, 2009·3 cites·24 claims
- 2169US8377501B2Coating and developing system control method of controlling coating and developing systemTOKYO ELECTRON LTD·Filed 2007·Granted Feb 19, 2013·3 cites·8 claims
- 2267US8057114B2Wet-processing apparatus, wet-processing method and storage mediumHAYASHIDA YASUSHI·Filed 2007·Granted Nov 15, 2011·4 cites·10 claims
- 2362US5028955AExposure apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Jul 2, 1991·36 cites·10 claims
- 2457US7880859B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2009·Granted Feb 1, 2011·0 cites·8 claims
- 2552US7955011B2Coating and developing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Jun 7, 2011·0 cites·9 claims
- 2650US7645713B2Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jan 12, 2010·0 cites·5 claims
- 2748US8313257B2Coating and developing apparatus, substrate processing method, and storage mediumMATSUOKA NOBUAKI·Filed 2011·Granted Nov 20, 2012·0 cites·8 claims
- 2847US8863373B2Apparatus and method of application and developmentMATSUOKA NOBUAKI·Filed 2010·Granted Oct 21, 2014·0 cites·6 claims
- 2947US7997813B2Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Aug 16, 2011·0 cites·5 claims
- 3044US8302556B2Coating and developing apparatusAKIMOTO MASAMI·Filed 2010·Granted Nov 6, 2012·0 cites·16 claims
- 3138US5596904ASteering gear apparatus of rack-and-pinion typeTOYOTA MOTOR CO LTD·Filed 1995·Granted Jan 28, 1997·6 cites·3 claims
- 3235US2009084211A1Hypoid gear device and final reduction gear for vehicleTOYOTA CHUO KENKYUSHO KK·Filed 2006·Application pending·0 cites
- 3328US5724857ASteering gear apparatus of rack-and-pinion typeTOYOTA MOTOR CO LTD·Filed 1996·Granted Mar 10, 1998·0 cites·4 claims
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