Inventor · disambiguated record
Kimberly Tschepen
Also filed as: TSCHEPEN KIMBERLY R
4 granted patents·1 pending application·629 citations·filing 2002–2005
82Inventor score
Files withMICRON TECHNOLOGY INC5
Top patents by PatentIndex Score
5 records- 0198US7387685B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jun 17, 2008·502 cites·16 claims
- 0296US6821347B2Apparatus and method for depositing materials onto microelectronic workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Nov 23, 2004·94 cites·54 claims
- 0385US6800172B2Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processorMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 5, 2004·30 cites·68 claims
- 0453US7192487B2Semiconductor substrate processing chamber and accessory attachment interfacial structureMICRON TECHNOLOGY INC·Filed 2003·Granted Mar 20, 2007·3 cites·40 claims
- 0549US2006027326A1Semiconductor substrate processing chamber and substrate transfer chamber interfacial structureMICRON TECHNOLOGY INC·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →