Inventor · disambiguated record
Mitsuji Marumo
Also filed as: MARUMO MITSUJI
13 granted patents·1 pending application·605 citations·filing 1991–2013
94Inventor score
Top patents by PatentIndex Score
14 records- 0192US5191218AVacuum chuckCANON KK·Filed 1991·Granted Mar 2, 1993·146 cites·16 claims
- 0291US5374829AVacuum chuckCANON KK·Filed 1994·Granted Dec 20, 1994·135 cites·9 claims
- 0391US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0474US5883932ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1995·Granted Mar 16, 1999·38 cites·13 claims
- 0573US9123760B2Processing apparatus and device manufacturing methodCANON KK·Filed 2013·Granted Sep 1, 2015·2 cites·17 claims
- 0668US8441614B2Processing apparatus and device manufacturing methodHIRANO SHINICHI·Filed 2009·Granted May 14, 2013·2 cites·10 claims
- 0768US5999589ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1998·Granted Dec 7, 1999·28 cites·16 claims
- 0863US5203547AVacuum attraction type substrate holding deviceCANON KK·Filed 1991·Granted Apr 20, 1993·36 cites·21 claims
- 0961US6800803B1Semiconductor manufacturing method and apparatusCANON KK·Filed 2000·Granted Oct 5, 2004·8 cites·31 claims
- 1061US5586159ASubstrate holding system and exposure apparatus having the sameCANON KK·Filed 1995·Granted Dec 17, 1996·21 cites·15 claims
- 1150US5160961ASubstrate holding deviceCANON KK·Filed 1991·Granted Nov 3, 1992·19 cites·19 claims
- 1245US5436693ASubstrate holding apparatus and a system using the sameCANON KK·Filed 1993·Granted Jul 25, 1995·15 cites·15 claims
- 1344US2007175838A1Mini-environment pod device, an exposure apparatus and a device manufacturing method using the sameCANON KK·Filed 2007·Application pending·0 cites
- 1438US5640440ASubstrate conveying systemCANON KK·Filed 1995·Granted Jun 17, 1997·6 cites·12 claims
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