Inventor · disambiguated record
Shinji Asari
Also filed as: ASARI SHINJI
5 granted patents·5 pending applications·16 citations·filing 2006–2022
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0180US10096504B2Method for managing atmosphere in storage containerTOKYO ELECTRON LTD·Filed 2014·Granted Oct 9, 2018·5 cites·20 claims
- 0280US7632354B2Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Dec 15, 2009·9 cites·4 claims
- 0364US9103029B2Processing apparatus and film forming methodWAMURA YU·Filed 2011·Granted Aug 11, 2015·2 cites·10 claims
- 0461US12051566B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 30, 2024·0 cites·10 claims
- 0546US2022372624A1Control apparatus and control method for film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0641US2013337394A1Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0736US9425074B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Aug 23, 2016·0 cites·7 claims
- 0836US2011303152A1Support structure, processing container structure and processing apparatusASARI SHINJI·Filed 2011·Application pending·0 cites
- 0935US2011309562A1Support structure and processing apparatusASARI SHINJI·Filed 2011·Application pending·0 cites
- 1034US2012199067A1Film-forming apparatusMOROZUMI YUICHIRO·Filed 2012·Application pending·0 cites
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