Inventor · disambiguated record
Tom K. Cho
Also filed as: CHO TOM · CHO TOM K
54 granted patents·36 pending applications·3,539 citations·filing 1994–2024
99Inventor score
Files withAPPLIED MATERIALS INC83YANG YAO-HUNG2KASZUBA ANDRZEI1NOWAK THOMAS1ROCHA-ALVAREZ JUAN CARLOS1
Top patents by PatentIndex Score
90 records- 0199US5558717ACVD Processing chamberAPPLIED MATERIALS INC·Filed 1994·Granted Sep 24, 1996·1.2k cites·36 claims
- 0298US7566891B2Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 28, 2009·553 cites·33 claims
- 0397US12195839B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2023·Granted Jan 14, 2025·1 cites·20 claims
- 0497US10119188B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·8 cites·20 claims
- 0597US9725799B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 8, 2017·15 cites·15 claims
- 0697US7692171B2Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectorsKASZUBA ANDRZEI·Filed 2007·Granted Apr 6, 2010·471 cites·26 claims
- 0797US7572337B2Blocker plate bypass to distribute gases in a chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2005·Granted Aug 11, 2009·43 cites·15 claims
- 0897US6450117B1Directing a flow of gas in a substrate processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·572 cites·61 claims
- 0996US7663121B2High efficiency UV curing systemAPPLIED MATERIALS INC·Filed 2006·Granted Feb 16, 2010·38 cites·12 claims
- 1095US7777198B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationAPPLIED MATERIALS INC·Filed 2007·Granted Aug 17, 2010·29 cites·30 claims
- 1194US10501843B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 10, 2019·3 cites·20 claims
- 1294US7829145B2Methods of uniformity control for low flow process and chamber to chamber matchingAPPLIED MATERIALS INC·Filed 2008·Granted Nov 9, 2010·18 cites·16 claims
- 1394US7622005B2Uniformity control for low flow process and chamber to chamber matchingAPPLIED MATERIALS INC·Filed 2005·Granted Nov 24, 2009·19 cites·8 claims
- 1493US11053581B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·2 cites·20 claims
- 1593US9865434B2Rare-earth oxide based erosion resistant coatings for semiconductor applicationAPPLIED MATERIALS INC·Filed 2013·Granted Jan 9, 2018·5 cites·18 claims
- 1693US9850568B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 26, 2017·11 cites·20 claims
- 1793US9708713B2Aerosol deposition coating for semiconductor chamber componentsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 18, 2017·5 cites·16 claims
- 1893US8203126B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationROCHA-ALVAREZ JUAN CARLOS·Filed 2010·Granted Jun 19, 2012·26 cites·15 claims
- 1993US5885356AMethod of reducing residue accumulation in CVD chamber using ceramic liningAPPLIED MATERIALS INC·Filed 1995·Granted Mar 23, 1999·154 cites·22 claims
- 2092US10418229B2Aerosol deposition coating for semiconductor chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Sep 17, 2019·3 cites·20 claims
- 2192US9797037B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2016·Granted Oct 24, 2017·2 cites·9 claims
- 2292US7425716B2Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beamAPPLIED MATERIALS INC·Filed 2006·Granted Sep 16, 2008·14 cites·27 claims
- 2390US9714465B2Gas distribution blocker apparatusTSUEI LUN·Filed 2009·Granted Jul 25, 2017·30 cites·18 claims
- 2489US7582167B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·15 cites·5 claims
- 2589US5853607ACVD processing chamberAPPLIED MATERIALS INC·Filed 1995·Granted Dec 29, 1998·91 cites·5 claims
- 2688US11532466B2Part-life estimation utilizing feature metrologyAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·2 cites·20 claims
- 2788US9761416B2Apparatus and methods for reducing particles in semiconductor process chambersAPPLIED MATERIALS INC·Filed 2014·Granted Sep 12, 2017·7 cites·2 claims
- 2888US9089007B2Method and apparatus for substrate support with multi-zone heatingYANG YAO-HUNG·Filed 2013·Granted Jul 21, 2015·10 cites·20 claims
- 2986US7354501B2Upper chamber for high density plasma CVDAPPLIED MATERIALS INC·Filed 2002·Granted Apr 8, 2008·39 cites·21 claims
- 3086US5441568AExhaust baffle for uniform gas flow patternAPPLIED MATERIALS INC·Filed 1994·Granted Aug 15, 1995·95 cites·19 claims
- 3185US11359722B2Multinode multi-use O-ring and method for forming a sealAPPLIED MATERIALS INC·Filed 2019·Granted Jun 14, 2022·11 cites·10 claims
- 3285US7074298B2High density plasma CVD chamberAPPLIED MATERIALS INC·Filed 2002·Granted Jul 11, 2006·23 cites·26 claims
- 3384US11074426B1Methods and systems for multi-part authentication and trackingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 27, 2021·2 cites·20 claims
- 3482US10685819B2Measuring concentrations of radicals in semiconductor processingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 16, 2020·4 cites·20 claims
- 3581US11680308B2Plasma erosion resistant rare-earth oxide based thin film coatingsAPPLIED MATERIALS INC·Filed 2021·Granted Jun 20, 2023·0 cites·20 claims
- 3680US11560913B2Brazed joint and semiconductor processing chamber component having the sameAPPLIED MATERIALS INC·Filed 2019·Granted Jan 24, 2023·2 cites·15 claims
- 3780US11398369B2Method and apparatus for actively tuning a plasma power sourceAPPLIED MATERIALS INC·Filed 2019·Granted Jul 26, 2022·2 cites·20 claims
- 3878US10211033B2Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformityAPPLIED MATERIALS INC·Filed 2015·Granted Feb 19, 2019·2 cites·20 claims
- 3974US11566318B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 31, 2023·0 cites·14 claims
- 4073US7141138B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2003·Granted Nov 28, 2006·13 cites·16 claims
- 4171US11566319B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 31, 2023·0 cites·11 claims
- 4270US11566317B2Ion beam sputtering with ion assisted deposition for coatings on chamber componentsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 31, 2023·0 cites·17 claims
- 4367US10446418B2Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductanceAPPLIED MATERIALS INC·Filed 2015·Granted Oct 15, 2019·1 cites·20 claims
- 4466US10734202B2Rare-earth oxide based erosion resistant coatings for semiconductor applicationAPPLIED MATERIALS INC·Filed 2015·Granted Aug 4, 2020·1 cites·20 claims
- 4565US11090893B2Method of reclaiming a sealAPPLIED MATERIALS INC·Filed 2018·Granted Aug 17, 2021·0 cites·20 claims
- 4663US7498268B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 3, 2009·1 cites·9 claims
- 4763US2024351055A1Icp source gas delivery hub and nozzleAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4863US2025242406A1Alloy microstructure formation for chamber componentsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4962US10727096B2Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductanceAPPLIED MATERIALS INC·Filed 2019·Granted Jul 28, 2020·0 cites·20 claims
- 5062US7279049B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2004·Granted Oct 9, 2007·7 cites·13 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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