Inventor · disambiguated record
Chin-Fa Tu
Also filed as: TU CHIN-FA
2 granted patents·4 pending applications·3 citations·filing 2004–2021
44Inventor score
Top patents by PatentIndex Score
6 records- 0181US10176967B2Load lock system for charged particle beam imagingHERMES MICROVISION INC·Filed 2017·Granted Jan 8, 2019·3 cites·25 claims
- 0256US10643818B2Load lock system for charged particle beam imagingASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·0 cites·21 claims
- 0347US2023152717A1Interface plate, inspection system and method of installing an inspection systemASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0445US2008320505A1Optical disc driveASUSTEK COMP INC·Filed 2008·Application pending·0 cites
- 0544US2023332669A1Vacuum system for mitigating damage due to a vacuum pump malfunctionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0625US2005066342A1Optical disc drive which can firmly fix the tray within the housingFiled 2004·Application pending·0 cites
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