Inventor · disambiguated record
Hirohiko Murata
Also filed as: MURATA HIROHIKO
5 granted patents·1 pending application·99 citations·filing 1991–2014
82Inventor score
Files withSHINKO ELECTRIC CO LTD2SUMITOMO EATON NOVA2SEN CORP AN SHI AND AXCELIS COMPANY1SUMITOMO HEAVY INDUSTRIES1
Top patents by PatentIndex Score
6 records- 0181US7947129B2Ion source apparatus and cleaning optimized method thereofSEN CORP AN SHI AND AXCELIS COMPANY·Filed 2004·Granted May 24, 2011·25 cites·9 claims
- 0279US6803590B2Ion beam mass separation filter, mass separation method thereof and ion source using the sameSUMITOMO EATON NOVA·Filed 2003·Granted Oct 12, 2004·25 cites·33 claims
- 0359US7012263B2Ion source apparatus and electronic energy optimized method thereforSUMITOMO EATON NOVA·Filed 2004·Granted Mar 14, 2006·4 cites·11 claims
- 0459US5237260AEngine-operated generator systemSHINKO ELECTRIC CO LTD·Filed 1991·Granted Aug 17, 1993·30 cites·5 claims
- 0550US6206180B1Vibratory parts-feederSHINKO ELECTRIC CO LTD·Filed 1998·Granted Mar 27, 2001·15 cites·3 claims
- 0644US2014231669A1Microwave ion source and method for starting sameSUMITOMO HEAVY INDUSTRIES·Filed 2014·Application pending·0 cites
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