Inventor · disambiguated record
Martin Shim
Also filed as: SHIM MARTIN
2 granted patents·1 pending application·7 citations·filing 2009–2018
45Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0174US8329585B2Method for reducing line width roughness with plasma pre-etch treatment on photoresistSHEU BEN-LI·Filed 2009·Granted Dec 11, 2012·7 cites·20 claims
- 0238US10020183B1Edge roughness reductionLAM RES CORP·Filed 2017·Granted Jul 10, 2018·0 cites·14 claims
- 0338US2019378725A1Method for transferring a pattern from an organic maskLAM RES CORP·Filed 2018·Application pending·0 cites
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