Inventor
SASAYA TOSHIHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SASAYA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS6262793B1Jul 17, 2001
Method of manufacturing and using correction member to correct aberration in projection exposure apparatus
NIKON CORP55 citations95
US5943172AAug 24, 1999
Projection optical system and projection exposure apparatus
NIKON CORP34 citations92
US5831776ANov 3, 1998
Projection optical system and projection exposure apparatus
NIKON CORP38 citations92
US5805344ASep 8, 1998
Projection optical system and projection exposure apparatus
NIKON CORP34 citations92
US6958803B2Oct 25, 2005
Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics
NIKON CORP10 citations73