Inventor
NISHIZUKA HIROSHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NISHIZUKA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS5025284AJun 18, 1991
Exposure method and exposure apparatus
HITACHI LTD53 citations96
US4699505AOct 13, 1987
Exposure method and exposure apparatus
HITACHI LTD46 citations96
US4598197AJul 1, 1986
Projection aligner
HITACHI LTD41 citations93
US4783225ANov 8, 1988
Wafer and method of working the same
HITACHI LTD27 citations91
US4298273ANov 3, 1981
Projection aligner and method of positioning a wafer
HITACHI LTD34 citations89
US4974018ANov 27, 1990
Exposure method and exposure apparatus
HITACHI LTD20 citations82
US5279992AJan 18, 1994
Method of producing a wafer having a curved notch
HITACHI LTD18 citations81
US5230747AJul 27, 1993
Wafer having chamfered bend portions in the joint regions between the contour of the wafer and the cut-away portion of the wafer
HITACHI LTD17 citations81
US4780606AOct 25, 1988
Projection aligner method utilizing monitoring of light quantity
HITACHI LTD14 citations79
US4701608AOct 20, 1987
Projection aligner with a sensor for monitoring light quantity
HITACHI LTD19 citations79
US4218136AAug 19, 1980
Method of and apparatus for aligning photomask
HITACHI LTD12 citations73