Inventor · disambiguated record
Nao Akashi
Also filed as: AKASHI NAO
4 granted patents·2 pending applications·5 citations·filing 2019–2023
59Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0184US11598007B2Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 7, 2023·5 cites·17 claims
- 0258US12230523B2Substrate processing apparatus and image capturing methodTOKYO ELECTRON LTD·Filed 2022·Granted Feb 18, 2025·0 cites·8 claims
- 0355US2024012373A1Information processing apparatus, storage medium, and control methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0447US12428242B2Information processing apparatus, transfer position correction method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Sep 30, 2025·0 cites·10 claims
- 0546US2024020895A1Chart generation method and information processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0645US12367602B2Information processing apparatus for teaching transfer position of substrate, transfer position teaching method, and substrate processing apparatus including the information processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 22, 2025·0 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →