Inventor · disambiguated record
Hidekazu Okuhira
Also filed as: OKUHIRA HIDEKAZU
7 granted patents·167 citations·filing 1985–1995
87Inventor score
Files withHITACHI LTD7
Top patents by PatentIndex Score
7 records- 0183US5181087ASemiconductor device and method of producing the sameHITACHI LTD·Filed 1989·Granted Jan 19, 1993·37 cites·52 claims
- 0276US4729964AMethod of forming twin doped regions of the same depth by high energy implantHITACHI LTD·Filed 1986·Granted Mar 8, 1988·51 cites·19 claims
- 0373US5744800ADefect observing electron microscopeHITACHI LTD·Filed 1995·Granted Apr 28, 1998·27 cites·22 claims
- 0456US5373191ASemiconductor device and method of producing the sameHITACHI LTD·Filed 1992·Granted Dec 13, 1994·14 cites·5 claims
- 0553US4693779AManufacturing apparatus for semiconductor devicesHITACHI LTD·Filed 1985·Granted Sep 15, 1987·20 cites·8 claims
- 0647US5401357ADry etching methodHITACHI LTD·Filed 1992·Granted Mar 28, 1995·17 cites·20 claims
- 0729US4936252AEquipment for manufacturing semiconductor devicesHITACHI LTD·Filed 1988·Granted Jun 26, 1990·1 cites·4 claims
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