Inventor · disambiguated record
Jin Nishikawa
Also filed as: NISHIKAWA JIN
5 granted patents·7 pending applications·124 citations·filing 2000–2009
80Inventor score
Top patents by PatentIndex Score
12 records- 0195US6757051B2Projection optical system, manufacturing method thereof, and projection exposure apparatusNIKON CORP·Filed 2001·Granted Jun 29, 2004·101 cites·58 claims
- 0272US7583361B2System for controlling a dual mover assembly for an exposure apparatusNIKON CORP·Filed 2006·Granted Sep 1, 2009·3 cites·29 claims
- 0372US6791766B2Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2002·Granted Sep 14, 2004·14 cites·31 claims
- 0469US7719661B2Illumination optical apparatus, exposure apparatus, and method for producing deviceNIKON CORP·Filed 2008·Granted May 18, 2010·3 cites·18 claims
- 0564US8576375B2Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatusNISHIKAWA JIN·Filed 2008·Granted Nov 5, 2013·3 cites·27 claims
- 0645US2009190117A1Exposure apparatus, manufacturing method and supporting method thereofNIKON CORP·Filed 2009·Application pending·0 cites
- 0744US2009141257A1Illumination optical apparatus, exposure apparatus, and method for producing deviceNIKON CORP·Filed 2008·Application pending·0 cites
- 0840US2007284502A1Hexapod kinematic mountings for optical elements, and optical systems comprising sameNIKON CORP·Filed 2006·Application pending·0 cites
- 0938US2009103063A1Cooling apparatus for optical member, barrel, exposure apparatus, and device manufacturing methodNISHIKAWA JIN·Filed 2008·Application pending·0 cites
- 1036US2003147155A1Optical element holding deviceNIKON CORP·Filed 2003·Application pending·0 cites
- 1135US2004240079A1Optical system, exposure apparatus having the optical system and device producing methodNIKON CORP·Filed 2004·Application pending·0 cites
- 1234US2002145711A1Exposure apparatus, apparatus for manufacturing devices, and method of manufacturing exposure apparatusesFiled 2000·Application pending·0 cites
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