Inventor
KURE TOKUO
JP61 patents
⚠️ This page may combine multiple inventors who share the name “KURE TOKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
48 patentsUS5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US5177576AJan 5, 1993
Dynamic random access memory having trench capacitors and vertical transistors
HITACHI LTD174 citations99
US4985114AJan 15, 1991
Dry etching by alternately etching and depositing
HITACHI LTD601 citations99
US5481109AJan 2, 1996
Surface analysis method and apparatus for carrying out the same
HITACHI LTD121 citations98
US5188976AFeb 23, 1993
Manufacturing method of non-volatile semiconductor memory device
HITACHI LTD120 citations98
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US5196910AMar 23, 1993
Semiconductor memory device with recessed array region
HITACHI LTD108 citations96
US5140389AAug 18, 1992
Semiconductor memory device having stacked capacitor cells
HITACHI LTD74 citations96
US5091761AFeb 25, 1992
Semiconductor device having an arrangement of IGFETs and capacitors stacked thereover
HITACHI LTD70 citations96
US4970564ANov 13, 1990
Semiconductor memory device having stacked capacitor cells
HITACHI LTD99 citations96
US4937641AJun 26, 1990
Semiconductor memory and method of producing the same
HITACHI LTD67 citations96
US4882289ANov 21, 1989
Method of making a semiconductor memory device with recessed array region
HITACHI LTD85 citations96
US4751557AJun 14, 1988
Dram with FET stacked over capacitor
HITACHI LTD45 citations96
US4635090AJan 6, 1987
Tapered groove IC isolation
HITACHI LTD49 citations96
US5357464AOct 18, 1994
Semiconductor memory having writing and reading transistors, method of fabrication thereof, and method of use thereof
HITACHI LTD63 citations94
US5352324AOct 4, 1994
Etching method and etching apparatus therefor
HITACHI LTD59 citations94
US5658811AAug 19, 1997
Method of manufacturing a semiconductor device
HITACHI LTD45 citations93
US5357131AOct 18, 1994
Semiconductor memory with trench capacitor
HITACHI LTD32 citations93
US4901128AFeb 13, 1990
Semiconductor memory
HITACHI LTD25 citations93
US4396460AAug 2, 1983
Method of forming groove isolation in a semiconductor device
HITACHI LTD34 citations93
US6849191B2Feb 1, 2005
Method and apparatus for treating surface of semiconductor
HITACHI LTD24 citations92
US6677244B2Jan 13, 2004
Specimen surface processing method
HITACHI LTD18 citations92
US6660647B1Dec 9, 2003
Method for processing surface of sample
HITACHI LTD28 citations92
US5877498AMar 2, 1999
Method and apparatus for X-ray analyses
HITACHI LTD42 citations92
US5594246AJan 14, 1997
Method and apparatus for x-ray analyses
HITACHI LTD21 citations92
US5296729AMar 22, 1994
Semiconductor memory device having static random access memory
HITACHI LTD48 citations92
US5053849AOct 1, 1991
Transistor with overlapping gate/drain and two-layered gate structures
HITACHI LTD51 citations90
USRE38296ENov 4, 2003
Semiconductor memory device with recessed array region
HITACHI LTD17 citations84
US6355517B1Mar 12, 2002
Method for fabricating semiconductor memory with a groove
HITACHI LTD17 citations84
US5200635AApr 6, 1993
Semiconductor device having a low-resistivity planar wiring structure
HITACHI LTD20 citations82
US4984048AJan 8, 1991
Semiconductor device with buried side contact
HITACHI LTD20 citations82
US5591998AJan 7, 1997
Semiconductor memory device
HITACHI LTD6 citations74
US5583358ADec 10, 1996
Semiconductor memory device having stacked capacitors
HITACHI LTD11 citations74
US5374576ADec 20, 1994
Method of fabricating stacked capacitor cell memory devices
HITACHI LTD11 citations74
US5237528AAug 17, 1993
Semiconductor memory
HITACHI LTD18 citations74
US5214496AMay 25, 1993
Semiconductor memory
HITACHI LTD13 citations74
US5128743AJul 7, 1992
Semiconductor device and method of manufacturing the same
HITACHI LTD13 citations74
US5061645AOct 29, 1991
Method of manufacturing a bipolar transistor
HITACHI LTD9 citations74
US5017981AMay 21, 1991
Semiconductor memory and method for fabricating the same
HITACHI LTD8 citations74
US4984038AJan 8, 1991
Semiconductor memory and method of producing the same
HITACHI LTD14 citations74
US4984030AJan 8, 1991
Vertical MOSFET DRAM
HITACHI LTD13 citations74
US4873203AOct 10, 1989
Method for formation of insulation film on silicon buried in trench
HITACHI LTD12 citations74
US4860071AAug 22, 1989
Semiconductor memory using trench capacitor
HITACHI LTD8 citations74
US4812894AMar 14, 1989
Semiconductor device
HITACHI LTD17 citations74
US6767838B1Jul 27, 2004
Method and apparatus for treating surface of semiconductor
HITACHI LTD11 citations73
SHOWA DENKO KK
1 patentRENESAS TECH CORP
1 patentShowing the top 50 of 61 patents by PatentIndex Score.