Inventor
SHICHI HIROYASU
JP78 patents
⚠️ This page may combine multiple inventors who share the name “SHICHI HIROYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
27 patentsUS6927391B2Aug 9, 2005
Method and apparatus for processing a micro sample
HITACHI LTD69 citations99
US6781125B2Aug 24, 2004
Method and apparatus for processing a micro sample
HITACHI LTD114 citations99
US6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US6717156B2Apr 6, 2004
Beam as well as method and equipment for specimen fabrication
HITACHI LTD109 citations98
US5481109AJan 2, 1996
Surface analysis method and apparatus for carrying out the same
HITACHI LTD121 citations98
US7550750B2Jun 23, 2009
Method and apparatus for processing a micro sample
HITACHI LTD26 citations96
US7205554B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD34 citations96
US7205560B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD32 citations96
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US7888639B2Feb 15, 2011
Method and apparatus for processing a micro sample
HITACHI LTD14 citations93
US7470918B2Dec 30, 2008
Method and apparatus for processing a micro sample
HITACHI LTD22 citations93
US7465945B2Dec 16, 2008
Method and apparatus for processing a micro sample
HITACHI LTD20 citations93
US4687938AAug 18, 1987
Ion source
HITACHI LTD38 citations93
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92
US5877498AMar 2, 1999
Method and apparatus for X-ray analyses
HITACHI LTD42 citations92
US5594246AJan 14, 1997
Method and apparatus for x-ray analyses
HITACHI LTD21 citations92
US5714757AFeb 3, 1998
Surface analyzing method and its apparatus
HITACHI LTD32 citations91
US4851673AJul 25, 1989
Secondary ion mass spectrometer
HITACHI LTD20 citations80
US4774433ASep 27, 1988
Apparatus for generating metal ions
HITACHI LTD22 citations80
US7372050B2May 13, 2008
Method of preventing charging, and apparatus for charged particle beam using the same
HITACHI LTD5 citations74
US6977376B2Dec 20, 2005
Method of prevention charging, and apparatus for charged particle beam using the same
HITACHI LTD6 citations74
US6774363B2Aug 10, 2004
Method of preventing charging, and apparatus for charged particle beam using the same
HITACHI LTD5 citations74
US4841143AJun 20, 1989
Charged particle beam apparatus
HITACHI LTD15 citations74
US5012109AApr 30, 1991
Charged particle beam apparatus
HITACHI LTD16 citations72
US4687930AAug 18, 1987
Ion beam apparatus
HITACHI LTD7 citations72
US10340117B2Jul 2, 2019
Ion beam device and sample observation method
HITACHI LTD1 citations63
HITACHI HIGH TECH CORP
16 patentsUS8779400B2Jul 15, 2014
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
HITACHI HIGH TECH CORP91 citations98
US6858851B2Feb 22, 2005
Apparatus for specimen fabrication and method for specimen fabrication
HITACHI HIGH TECH CORP57 citations96
US7326942B2Feb 5, 2008
Ion beam system and machining method
HITACHI HIGH TECH CORP24 citations93
US7095021B2Aug 22, 2006
Method, apparatus and system for specimen fabrication by using an ion beam
HITACHI HIGH TECH CORP19 citations93
US7700931B2Apr 20, 2010
Ion beam processing apparatus
HITACHI HIGH TECH CORP20 citations92
US7952083B2May 31, 2011
Ion beam system and machining method
HITACHI HIGH TECH CORP11 citations84
US7368729B2May 6, 2008
Method, apparatus and system for specimen fabrication by using an ion beam
HITACHI HIGH TECH CORP12 citations84
US7242013B2Jul 10, 2007
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
HITACHI HIGH TECH CORP10 citations84
US7482603B2Jan 27, 2009
Apparatus and method for specimen fabrication
HITACHI HIGH TECH CORP10 citations83
US7453072B2Nov 18, 2008
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
HITACHI HIGH TECH CORP7 citations74
US9640360B2May 2, 2017
Ion source and ion beam device using same
HITACHI HIGH TECH CORP2 citations73
US10304653B2May 28, 2019
Ion milling device, ion source and ion milling method
HITACHI HIGH TECH CORP3 citations72
US7725278B2May 25, 2010
Method for failure analysis and system for failure analysis
HITACHI HIGH TECH CORP3 citations63
US7709062B2May 4, 2010
Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device
HITACHI HIGH TECH CORP6 citations63
US7667212B2Feb 23, 2010
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor
HITACHI HIGH TECH CORP2 citations63
US7200506B2Apr 3, 2007
Method for failure analysis and system for failure analysis
HITACHI HIGH TECH CORP3 citations63
SHICHI HIROYASU
3 patentsUS8481980B2Jul 9, 2013
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample
SHICHI HIROYASU17 citations92
US8263943B2Sep 11, 2012
Ion beam device
SHICHI HIROYASU16 citations92
US8115184B2Feb 14, 2012
Gas field ion source, charged particle microscope, and apparatus
SHICHI HIROYASU20 citations92
TOKUDA MITSUO
2 patentsHITACHI HIGH TECH SCIENCE CORP
1 patentKAWANAMI YOSHIMI
1 patentShowing the top 50 of 78 patents by PatentIndex Score.