Inventor · disambiguated record
Toshio Matsuura
Also filed as: MATSUURA TOSHIO
23 granted patents·1,167 citations·filing 1981–2011
97Inventor score
Top patents by PatentIndex Score
23 records- 0198US4465368AExposure apparatus for production of integrated circuitNIPPON KOGAKU KK·Filed 1981·Granted Aug 14, 1984·474 cites·10 claims
- 0295US4677301AAlignment apparatusNIPPON KOGAKU KK·Filed 1984·Granted Jun 30, 1987·90 cites·18 claims
- 0393US4734746AExposure method and system for photolithographyNIPPON KOGAKU KK·Filed 1987·Granted Mar 29, 1988·72 cites·19 claims
- 0488US4699515AProcess of transfer of mask pattern onto substrate and apparatus for alignment therebetweenNIPPON KOGAKU KK·Filed 1985·Granted Oct 13, 1987·50 cites·17 claims
- 0585US4655598APosition detection method and apparatusNIPPON KOGAKU KK·Filed 1985·Granted Apr 7, 1987·41 cites·12 claims
- 0684US5617211AExposure apparatusNIKON CORP·Filed 1995·Granted Apr 1, 1997·60 cites·19 claims
- 0783US6366341B1Exposure method and exposure apparatusNIKON CORP·Filed 2000·Granted Apr 2, 2002·32 cites·24 claims
- 0879US5912726AProjection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination systemNIKON CORP·Filed 1997·Granted Jun 15, 1999·47 cites·31 claims
- 0979US4702606APosition detecting systemNIPPON KOGAKU KK·Filed 1985·Granted Oct 27, 1987·30 cites·16 claims
- 1076US5523841ADistance measuring apparatus using multiple switched interferometersNIKON CORP·Filed 1994·Granted Jun 4, 1996·29 cites·12 claims
- 1174US5973766AExposure method and exposure deviceNIKON CORP·Filed 1997·Granted Oct 26, 1999·34 cites·30 claims
- 1271US5774240AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 30, 1998·29 cites·6 claims
- 1371US4723221AMethod for manufacturing semiconductor device and apparatus thereforNIPPON KOGAKU KK·Filed 1987·Granted Feb 2, 1988·27 cites·13 claims
- 1471US4566795AAlignment apparatusNIPPON KOGAKU KK·Filed 1984·Granted Jan 28, 1986·21 cites·4 claims
- 1568US5504596AExposure method and apparatus using holographic techniquesNIKON CORP·Filed 1993·Granted Apr 2, 1996·29 cites·3 claims
- 1666US5995199APosition measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure maskNIKON CORP·Filed 1997·Granted Nov 30, 1999·28 cites·14 claims
- 1764US5528390AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 18, 1996·22 cites·8 claims
- 1859US5442418AExposure methodNIKON CORP·Filed 1994·Granted Aug 15, 1995·17 cites·13 claims
- 1955US7876118B2Test equipmentADVANTEST CORP·Filed 2009·Granted Jan 25, 2011·2 cites·6 claims
- 2051US9079808B2Gas generator, gas generator holder and method for manufacturing gas generator holderMATSUURA TOSHIO·Filed 2011·Granted Jul 14, 2015·3 cites·12 claims
- 2145US4801208AProjection type exposing apparatusNIKON CORP·Filed 1986·Granted Jan 31, 1989·17 cites·17 claims
- 2242US5985496AExposure method and apparatusNIKON CORPORATIOIN·Filed 1997·Granted Nov 16, 1999·8 cites·18 claims
- 2323US5295086AMethod of producing noise free frequency spectrum signalsJEOL LTD·Filed 1990·Granted Mar 15, 1994·5 cites·10 claims
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