Inventor · disambiguated record
Stijn Boschker
Also filed as: BOSCHKER STIJN
3 granted patents·21 citations·filing 2008–2008
67Inventor score
Files withBUTLER HANS3
Top patents by PatentIndex Score
3 records- 0188US8164737B2Lithographic apparatus having an active damping subassemblyBUTLER HANS·Filed 2008·Granted Apr 24, 2012·11 cites·17 claims
- 0273US8059259B2Damping arrangement, active damping system, lithographic apparatus, and projection assemblyBUTLER HANS·Filed 2008·Granted Nov 15, 2011·6 cites·17 claims
- 0368US8245824B2Combination of structure and an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2008·Granted Aug 21, 2012·4 cites·20 claims
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