Inventor
LIU CHENG YIH
CN9 patents
⚠️ This page may combine multiple inventors who share the name “LIU CHENG YIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS4113551ASep 12, 1978
Polycrystalline silicon etching with tetramethylammonium hydroxide
IBM59 citations95
US4171242AOct 16, 1979
Neutral pH silicon etchant for etching silicon in the presence of phosphosilicate glass
IBM50 citations91
US4240845ADec 23, 1980
Method of fabricating random access memory device
IBM25 citations77
US4552831ANov 12, 1985
Fabrication method for controlled via hole process
IBM7 citations72
US4258079AMar 24, 1981
Preparation of continuous films of diacetylenic polymers
IBM17 citations71
US4219834AAug 26, 1980
One-device monolithic random access memory and method of fabricating same
IBM10 citations68