Inventor

MATSUDA TETSUO

JP62 patents

⚠️ This page may combine multiple inventors who share the name “MATSUDA TETSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUDA TETSUO

TOSHIBA KK

Semiconductor device and method for manufacturing same

Method of manufacturing semiconductor devices

Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium

Plating method and plating apparatus

Method of manufacturing a copper interconnect

Semiconductor device and method of manufacturing the same

Film formation method

Semiconductor device manufacturing method and semiconductor device

Method for forming barrier layer for copper metallization

Fabrication process using a multi-layer antireflective layer

Fabrication process using a thin resist

Method of planarizing a semiconductor workpiece surface

Method of manufacturing semiconductor devices

Multilayer wiring technique for a semiconductor device

Plating method and plating apparatus

Semiconductor device and method for manufacturing the same

Semiconductor device having a damascene type wiring layer

Method of making multi-level wiring in a semiconductor device

Method of forming diffusion barrier for copper interconnects

Method for manufacturing a semiconductor device

Method of activating at least one gas to produce different charged species, selecting specific species, decelerating the species, and chemically reacting the species to form a thin film

Method of forming thin film by chemical vapor deposition

Power semiconductor device with epitaxially-filled trenches

Method of manufacturing a semiconductor device

Semiconductor device manufacturing method and semiconductor device

Semiconductor device and method of manufacturing the same

Method of manufacturing electronic device

Semiconductor device and method of manufacturing the same

Electronic device manufacturing method

Method for forming a plating film, and device for forming the same

Substrate processing method and substrate processing apparatus

Method for manufacturing semiconductor devices

Phase shifting mask and method of manufacturing the same

Thin film forming method and apparatus

Semiconductor device having trenches filled with a semiconductor having an impurity concentration gradient

Semiconductor device with tapered trenches and impurity concentration gradients

Plating method

Electronic device manufacturing method

TOYO JOZO KK

Process for encapsulation of medicaments

Antibiotic aculeacins

Novel cellulose microcapsules and preparation thereof

Derivatives of antibiotic tylosin

Deformyltylosin derivatives

Process for the production of 7-amino-cephem compounds

EEL calcitonin

EBARA CORP

Plating apparatus

Method and apparatus for plating substrate with copper

Plating method and plating apparatus

IBM

PECVD method of depositing fluorine doped oxide using a fluorine precursor containing a glass-forming element

IMAMURA TOMOMI

Semiconductor device and method for manufacturing of same