Inventor · disambiguated record
Hisato Tanaka
Also filed as: TANAKA HISATO
9 granted patents·134 citations·filing 1993–2010
86Inventor score
Top patents by PatentIndex Score
9 records- 0190US5306921AIon implantation system using optimum magnetic field for concentrating ionsTOKYO ELECTRON LTD·Filed 1993·Granted Apr 26, 1994·72 cites·21 claims
- 0281US5296713AIon source deviceTOKYO ELECTRON LTD·Filed 1993·Granted Mar 22, 1994·43 cites·20 claims
- 0376US8485507B2Movable table and processing stageINOUE YUYA·Filed 2008·Granted Jul 16, 2013·6 cites·6 claims
- 0466US8783674B2StageINOUE YUYA·Filed 2010·Granted Jul 22, 2014·4 cites·7 claims
- 0564US6954716B2Method of automatically resetting processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Oct 11, 2005·8 cites·5 claims
- 0643US7555406B2Method of maintaining and automatically inspecting processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jun 30, 2009·0 cites·5 claims
- 0738US7779807B2Intake/exhaust valve and its seal for internal combustion engineHONDA MOTOR CO LTD·Filed 2004·Granted Aug 24, 2010·1 cites·19 claims
- 0836US7386423B2Methods of self-diagnosing software for driving processing apparatusTANAKA HISATO·Filed 2004·Granted Jun 10, 2008·0 cites·18 claims
- 0935US8827254B2Substrate transfer processing apparatusINOUE YUYA·Filed 2010·Granted Sep 9, 2014·0 cites·1 claims
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