Inventor · disambiguated record
Osamu Hirakawa
Also filed as: HIRAKAWA OSAMU
38 granted patents·5 pending applications·746 citations·filing 1981–2018
97Inventor score
Top patents by PatentIndex Score
43 records- 0197US5002008ACoating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by stateTOKYO ELECTRON LTD·Filed 1989·Granted Mar 26, 1991·115 cites·12 claims
- 0295US5061144AResist process apparatusTOKYO ELECTRON LTD·Filed 1989·Granted Oct 29, 1991·183 cites·10 claims
- 0394US7697110B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2005·Granted Apr 13, 2010·19 cites·9 claims
- 0491US4644912ACam shaft and method of manufactureNIPPON PISTON RING CO LTD·Filed 1985·Granted Feb 24, 1987·51 cites·12 claims
- 0590US5089305ACoating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by stateTOKYO ELECTRON LTD·Filed 1990·Granted Feb 18, 1992·74 cites·6 claims
- 0686US4899686ACoating deviceTOKYO ELECTRON LTD·Filed 1989·Granted Feb 13, 1990·49 cites·10 claims
- 0780US4615310ACamshaft with lubricating oil supplying functionNIPPON PISTON RING CO LTD·Filed 1984·Granted Oct 7, 1986·26 cites·8 claims
- 0878US10160015B2Foreign substance removal apparatus and foreign substance detection apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 25, 2018·2 cites·4 claims
- 0976US9343349B2Substrate holding apparatus and substrate holding methodTOKYO ELECTRON LTD·Filed 2013·Granted May 17, 2016·4 cites·8 claims
- 1076US4595556AMethod for manufacturing camshaftNIPPON PISTON RING CO LTD·Filed 1985·Granted Jun 17, 1986·32 cites·4 claims
- 1176US4505485ARotary seal with linear wear resistant treated layerNIPPON PISTON RING CO LTD·Filed 1983·Granted Mar 19, 1985·26 cites·8 claims
- 1275US8997822B2Substrate inverting device, substrate inverting method, and peeling systemIWASHITA YASUHARU·Filed 2012·Granted Apr 7, 2015·5 cites·3 claims
- 1375US8997821B2Delamination systemTOKYO ELECTRON LTD·Filed 2013·Granted Apr 7, 2015·3 cites·4 claims
- 1473US7924402B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Granted Apr 12, 2011·3 cites·5 claims
- 1572US7530749B2Coater/developer and coating/developing methodTOKYO ELECTRON LTD·Filed 2004·Granted May 12, 2009·14 cites·6 claims
- 1668US8490856B2Joint apparatus, joint method, and computer storage mediumHIRAKAWA OSAMU·Filed 2010·Granted Jul 23, 2013·2 cites·9 claims
- 1768US4665766AShaft memberNIPPON PISTON RING CO LTD·Filed 1984·Granted May 19, 1987·21 cites·4 claims
- 1867US9919509B2Peeling device, peeling system and peeling methodHIRAKAWA OSAMU·Filed 2011·Granted Mar 20, 2018·2 cites·17 claims
- 1966US7838801B2Heating apparatus, heating method, coating apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Nov 23, 2010·2 cites·29 claims
- 2066US4368465AMethod of actuating a plasma display panelFUJITSU LTD·Filed 1981·Granted Jan 11, 1983·20 cites·6 claims
- 2164US9330898B2Separation system, separation method, program and computer storage mediumHIRAKAWA OSAMU·Filed 2011·Granted May 3, 2016·2 cites·7 claims
- 2264US4790875AAbrasion resistant sintered alloyNIPPON PISTON RING CO LTD·Filed 1984·Granted Dec 13, 1988·13 cites·17 claims
- 2362US5028955AExposure apparatusTOKYO ELECTRON LTD·Filed 1990·Granted Jul 2, 1991·36 cites·10 claims
- 2461US4863513AIron-base anti-wear sintered alloy memberUMEHA GENKICHI·Filed 1987·Granted Sep 5, 1989·14 cites·3 claims
- 2558US10946419B2Foreign substance removal apparatus and foreign substance detection apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Mar 16, 2021·0 cites·3 claims
- 2657US10422875B2Fastening member, and obstacle detecting device employing fastening memberPANASONIC IP MAN CO LTD·Filed 2015·Granted Sep 24, 2019·1 cites·14 claims
- 2757US9620099B2Ultrasonic transducer device and method of attaching the samePANASONIC CORP·Filed 2014·Granted Apr 11, 2017·1 cites·10 claims
- 2855US9296350B2Ultrasonic wave devicePANASONIC CORP·Filed 2014·Granted Mar 29, 2016·1 cites·13 claims
- 2953US4400795AMagnetic bubble memory deviceFUJITSU LTD·Filed 1981·Granted Aug 23, 1983·12 cites·10 claims
- 3051US8330934B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2010·Granted Dec 11, 2012·0 cites·7 claims
- 3148US9823341B2Ultrasonic sensorPANASONIC IP MAN CO LTD·Filed 2013·Granted Nov 21, 2017·0 cites·5 claims
- 3248US2014284000A1Separation apparatus, separation system, separation method and non-transitory computer readable storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 3344US9679798B2Substrate conveyance apparatus and substrate peeling systemTOKYO ELECTRON LTD·Filed 2014·Granted Jun 13, 2017·0 cites·10 claims
- 3444US4468075AStructure of electrical connecting deviceFUJITSU LTD·Filed 1981·Granted Aug 28, 1984·11 cites·10 claims
- 3544US2013000684A1Cleaning method and cleaning apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 3640US9827756B2Separation apparatus, separation system, and separation methodHIRAKAWA OSAMU·Filed 2012·Granted Nov 28, 2017·0 cites·24 claims
- 3739US10071544B2Separation apparatus, separation system, and separation methodTOKYO ELECTRON LTD·Filed 2012·Granted Sep 11, 2018·0 cites·15 claims
- 3838US9956755B2Separation method, separation apparatus, and separation systemHIRAKAWA OSAMU·Filed 2012·Granted May 1, 2018·0 cites·18 claims
- 3937US2014158303A1Bonding system, substrate processing system, and bonding methodHIRAKAWA OSAMU·Filed 2012·Application pending·0 cites
- 4037US2012329000A1Substrate processing apparatus, substrate processing method, program and computer storage mediumHIRAKAWA OSAMU·Filed 2011·Application pending·0 cites
- 4134US2013153116A1Joint system, substrate processing system, and joint methodHIRAKAWA OSAMU·Filed 2011·Application pending·0 cites
- 4232US9613797B2Cleaning device, peeling system, cleaning method and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Apr 4, 2017·0 cites·8 claims
- 4329US4649011AMethod of making a cam shaftNIPPON PISTON RING CO LTD·Filed 1985·Granted Mar 10, 1987·2 cites·3 claims
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