Inventor
ENGLHARDT ERIC ANDREW
US8 patents
Patents
8 patentsUS7243003B2Jul 10, 2007
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC65 citations97
US7792608B2Sep 7, 2010
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC21 citations92
US7359767B2Apr 15, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC33 citations92
US7346431B2Mar 18, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
APPLIED MATERIALS INC27 citations92
US7258520B2Aug 21, 2007
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
APPLIED MATERIALS INC34 citations90
US7611319B2Nov 3, 2009
Methods and apparatus for identifying small lot size substrate carriers
APPLIED MATERIALS INC10 citations84
US7778721B2Aug 17, 2010
Small lot size lithography bays
APPLIED MATERIALS INC7 citations73
US7577487B2Aug 18, 2009
Methods and apparatus for a band to band transfer module
APPLIED MATERIALS INC4 citations62