Inventor
SHAH VINAY
US28 patents
⚠️ This page may combine multiple inventors who share the name “SHAH VINAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7951637B2May 31, 2011
Back contact solar cells using printed dielectric barrier
APPLIED MATERIALS INC68 citations96
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7221993B2May 22, 2007
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC43 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US7107125B2Sep 12, 2006
Method and apparatus for monitoring the position of a semiconductor processing robot
APPLIED MATERIALS INC19 citations90
US7720558B2May 18, 2010
Methods and apparatus for mapping carrier contents
APPLIED MATERIALS INC8 citations84
US7611319B2Nov 3, 2009
Methods and apparatus for identifying small lot size substrate carriers
APPLIED MATERIALS INC10 citations84
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US7711445B2May 4, 2010
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC5 citations74
US7778721B2Aug 17, 2010
Small lot size lithography bays
APPLIED MATERIALS INC7 citations73
US7577487B2Aug 18, 2009
Methods and apparatus for a band to band transfer module
APPLIED MATERIALS INC4 citations62
INTEVAC INC
6 patentsUS9525099B2Dec 20, 2016
Dual-mask arrangement for solar cell fabrication
INTEVAC INC10 citations82
US10115617B2Oct 30, 2018
System architecture for vacuum processing
INTEVAC INC5 citations71
US9502276B2Nov 22, 2016
System architecture for vacuum processing
INTEVAC INC5 citations71
US10062600B2Aug 28, 2018
System and method for bi-facial processing of substrates
INTEVAC INC3 citations70
US8998553B2Apr 7, 2015
High throughput load lock for solar wafers
INTEVAC INC2 citations57
US10106883B2Oct 23, 2018
Sputtering system and method using direction-dependent scan speed or power
INTEVAC INC0 citations36