Inventor · disambiguated record
Motoki Akimoto
Also filed as: AKIMOTO MOTOKI
7 granted patents·71 citations·filing 2000–2012
85Inventor score
Top patents by PatentIndex Score
7 records- 0186US7819658B2Heat treatment system and method thereforeTOKYO ELECTRON LTD·Filed 2007·Granted Oct 26, 2010·9 cites·7 claims
- 0281US7210924B2Heat treatment system and a method for cooling a loading chamberTOKYO ELECTRON LTD·Filed 2004·Granted May 1, 2007·20 cites·3 claims
- 0378US7059849B2Heat treatment system and a method for cooling a loading chamberTOKYO ELECTRON LTD·Filed 2001·Granted Jun 13, 2006·19 cites·5 claims
- 0469US6852601B2Heat treatment method that includes a low negative pressureTOKYO ELECTRON LTD·Filed 2002·Granted Feb 8, 2005·11 cites·3 claims
- 0565US6409503B1Heat treatment method and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 25, 2002·9 cites·13 claims
- 0664US8147241B2Method of object transfer for a heat treatment systemMOCHIZUKI SHINYA·Filed 2010·Granted Apr 3, 2012·1 cites·1 claims
- 0762US9695791B2Fuel supply device for engineAKIMOTO MOTOKI·Filed 2012·Granted Jul 4, 2017·2 cites·5 claims
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