Inventor · disambiguated record
Mir Farrokh Shayegan Salek
Also filed as: SHAYEGAN SALEK MIR FARROKH
2 granted patents·2 pending applications·3 citations·filing 2016–2022
43Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0178US10754256B2Method and apparatus for pattern correction and verificationASML NETHERLANDS BV·Filed 2016·Granted Aug 25, 2020·2 cites·21 claims
- 0268US11614690B2Methods of tuning process modelsASML NETHERLANDS BV·Filed 2018·Granted Mar 28, 2023·1 cites·20 claims
- 0351US2024272543A1Determining rounded contours for lithography related patternsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0446US2022276564A1Method and apparatus for photolithographic imagingASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →