Inventor
SOBUKAWA HIROSHI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “SOBUKAWA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
13 patentsUS7411191B2Aug 12, 2008
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP20 citations93
US6589009B1Jul 8, 2003
Turbo-molecular pump
EBARA CORP20 citations92
US6382249B1May 7, 2002
Vacuum exhaust system
EBARA CORP28 citations92
US7098045B2Aug 29, 2006
Processing method utilizing an apparatus to be sealed against workpiece
EBARA CORP14 citations84
US6869890B2Mar 22, 2005
Processing apparatus to be sealed against workpiece
EBARA CORP12 citations84
US6220831B1Apr 24, 2001
Turbomolecular pump
EBARA CORP18 citations83
US6585480B2Jul 1, 2003
Turbo-molecular pump
EBARA CORP11 citations74
US6062810AMay 16, 2000
Turbomolecular pump
EBARA CORP12 citations73
US10995765B2May 4, 2021
Magnetic levitated pump
EBARA CORP3 citations71
US11597051B2Mar 7, 2023
Method for polishing substrate including functional chip
EBARA CORP1 citations62
US6092994AJul 25, 2000
Liquid delivery device, method of controlling such liquid delivery device, and liquid delivery pump
EBARA CORP6 citations60
US11607769B2Mar 21, 2023
Polishing apparatus of substrate
EBARA CORP0 citations52
US9105444B2Aug 11, 2015
Electro-optical inspection apparatus and method with dust or particle collection function
EBARA CORP0 citations51