Inventor · disambiguated record
Yudai Tadaki
Also filed as: TADAKI YUDAI
4 granted patents·2 pending applications·6 citations·filing 2007–2014
66Inventor score
Top patents by PatentIndex Score
6 records- 0167US8679259B2Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vesselKAMEDA KENJI·Filed 2011·Granted Mar 25, 2014·2 cites·8 claims
- 0266US9540727B2Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Jan 10, 2017·2 cites·14 claims
- 0362US9683288B2Method of manufacturing semiconductor device and method of cleaning processing vesselHITACHI INT ELECTRIC INC·Filed 2014·Granted Jun 20, 2017·1 cites·10 claims
- 0459US8308871B2Thermal cleaning gas production and supply systemTADAKI YUDAI·Filed 2009·Granted Nov 13, 2012·1 cites·17 claims
- 0548US2008236483A1Method for low temperature thermal cleaningSONOBE JUN·Filed 2008·Application pending·0 cites
- 0638US2008236482A1Method for low temperature thermal cleaningSONOBE JUN·Filed 2007·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →